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KMID : 1011419990040010021
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Journal of Korean Ophthalmic Optics Society
1999 Volume.4 No. 1 p.21 ~ p.25
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Sheet Reisistance Analysis of TiNx Thin Film by RF Magnetron Sputtering
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Park Moon-Chan
Oh Jeong-Hong
Hwangbo Chang Kwon
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Abstract
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KEYWORD
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